类金钢石薄膜的制备工艺极其光学特性

类金钢石薄膜的制备工艺极其光学特性

摘 要:本论文采用直流磁控溅射，以Ar为工作气体溅射高纯石墨靶材制备了DLC薄膜。采用AES、UV-VIS等现代化测试手段，通过对薄膜宏观和微观结构的分析，研究了制备工艺对DLC薄膜光学性能的影响。以直流磁控溅射法制备了类金刚石薄膜，俄歇电子通过对检测结果的分析，得到以下结果：

通过测定和计算不同沉积气压条件下制备的薄膜的sp2 键的百分含量和sp2键与sp3键比率，发现沉积气压低于0.8Pa时，sp2 键的百分含量随沉积气压的增大而减小。采用紫外-可见光透射光谱分析了薄膜的光吸收特性和光学带隙，其光学性质受光学带隙的直接影响。

关键词：DLC薄膜；俄歇电子能谱；电子结构；光学带隙；sp2键与sp3键比率

Preparation craft and optics characteristic of Dianond-like carbon films

Abstract:Diamond-like carbon films and DLC:N were prepared by DC reactive magnetron sputtering with Ar as source gases separately, and pure graphite a❥s a target . Based on this, different surface morphology and property of diamond like carbon films was depo✍sited by controlling the deposition pressure,ambient pressure sputtering powers 、working gas and so on. The films studied by AES and UV-VIS to investigate property and electron structure of Diamond-like cซarbon films. Following conclusions can be made:

The values of ‘D’were used to be calculated the percentage of sp2 hybrid bonds and the ratio of sp2/ sp3. Beyond PAr=0.8pa,these values decrease with the increasing of deposition pressure. The optical tra☃nsmission and absorption properties, and the optical band gap of the films were characterized by an UV-VIS spectrophotometer. The effects of the sputtering ศpower density and the gas pressure on the optical character and optical band gap of the films were studied. The results indicate that the optical characteristic of the film is affected directly by optical band gap.

Keyword:Diamond-like carbon films；AES; electronic structure；optical band gap；the ratio of sp2 and sp3

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